Subject Code: 18P4PH03 Subject Name: THIN FILM TECHNOLOGY UNIT – I -Construction and uses of vapor sources - Wire - crucible vacuum pumps and heated sources - measurement of Pressure - gauges - Physical vapor deposition (PVD) - Thermal evaporation - electron beam evaporation - Pulsed laser deposition; - Ion beam assisted deposition - Chemical vapor deposition (CVD) - MOCVD and PECVD processes - Chemical methods - Nucleation and growth of thin films. • https://www.youtube.com/watch?v=aY1VxwIbr6E • https://www.youtube.com/watch?v=9lm2ubpOoL4 • https://www.youtube.com/watch?v=LFy8GL3tbW8 • https://www.youtube.com/watch?v=CM4Y14b6M6U • https://www.youtube.com/watch?v=xIU1DDbDEDQ • https://www.youtube.com/watch?v=JL8qvTW-WCg • https://www.youtube.com/watch?v=9K49pVEEDwA • https://www.youtube.com/watch?v=7UPstHIQNZ4 • https://www.youtube.com/watch?v=BBAZLj6Glgc • https://www.youtube.com/watch?v=xAII9Bm_wj4 • https://www.youtube.com/watch?v=lxNYAxr5lPc |
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UNIT – II -Quartz crystal monitor: Crystal oscillator thickness monitor - Resistance Monitor. - Multiple Beam Interferometer, - Fizeau Tolansky technique - Fringes of equal chromatic order (FECO) method - Ellipsometry. • https://www.youtube.com/watch?v=ePt0NTxVWgY • https://www.youtube.com/watch?v=tJodcGa0ef4 • https://www.youtube.com/watch?v=2rE1NDkVsHQ • https://www.youtube.com/watch?v=ZEXxrFRMRu4 • https://www.youtube.com/watch?v=Iyw26UKYrIM • https://www.youtube.com/watch?v=K4N5HypPmNc • https://www.youtube.com/watch?v=vCfO_8N1-u0 |
UNIT – III -Influence of thickness on resistivity - Electrical conduction in thin metallic films - Resistivity of the metallic film - Sheet resistance - Hall effect - Calculation of mobility - DC conduction mechanism - Low field and high field conduction - AC conduction mechanism. - Temperature dependence of conductivity - Thermal treatment process- Breakdown mechanism in dielectric films • https://www.youtube.com/watch?v=rzxCRJcFaIw • https://www.youtube.com/watch?v=0x_RarHNhVk • https://www.youtube.com/watch?v=xzmJJpHI-9E • https://www.youtube.com/watch?v=bAkNC1wIlGc • https://www.youtube.com/watch?v=RHDu5kJo8u0 • https://www.youtube.com/watch?v=q1m-QoHRJmk • https://www.youtube.com/watch?v=H2L6N-HKAA4 • https://www.youtube.com/watch?v=Quut0vwgIEo |
UNIT – IV -X-ray diffraction - powder diffraction - determination of lattice parameters-structure - Optical constants of thin films UV spectrophotometer - Transmittance, absorption, determination of band gap. • https://www.youtube.com/watch?v=Gpduks81e_0 • https://www.youtube.com/watch?v=Abp-Qq6NyNk • https://www.youtube.com/watch?v=n6OMH-SK-F8 • https://www.youtube.com/watch?v=PGi_WR9aTzA |
UNIT – V -Materials and Design of thin film resistors. - Materials - Capacitor structures - Capacitor yield and capacitor stability - Thin film field effect transistors - Thin film solar cells - anti reflection coatings. • https://www.youtube.com/watch?v=Aw3B7joeYiU • https://www.youtube.com/watch?v=Pzu3wE9IIwc\ • https://www.youtube.com/watch?v=r2RTmUxsYNI • https://www.youtube.com/watch?v=-Kc3UhfqTyI • https://www.youtube.com/watch?v=Ln4CZSFIMw0 • https://www.youtube.com/watch?v=3si-BbtfQT0 |